TY  - JOUR
AU  - Dai, Gaoliang
AU  - Hahm, Kai
AU  - Bosse, Harald
AU  - Dixson, Ronald
C2  - Measurement Science & Technology
DA  - 2017-04-19 00:04:00
LA  - en
M1  - 28
PB  - Measurement Science & Technology
PY  - 2017
TI  - Comparison of line width calibration using critical dimension atomic force microscopes between PTB and NIST
ER  -