TY  - JOUR
AU  - Sunday, Christopher
AU  - Amoah, Papa
AU  - Montgomery, Karl
AU  - Obeng, Yaw
C2  - ECS Journal of Solid State Science and Technology
DA  - 2017-08-29 00:08:00
DO  - https://doi.org/10.1149/2.0141709jss
LA  - en
M1  - 6
PB  - ECS Journal of Solid State Science and Technology
PY  - 2017
TI  - Broadband Dielectric Spectroscopic Characterization of Thermal Stability of Low-k Die-lectric Thin Films for Micro- and Nanoelectronic Applications
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=923461
ER  -