TY  - JOUR
AU  - Gokhale, Vikrant
AU  - Gorman, Jason
C2  - Journal of Microelectromechanical Systems
DA  - 2018-08-13 00:08:00
DO  - https://doi.org/10.1109/JMEMS.2018.2861322
LA  - en
PB  - Journal of Microelectromechanical Systems
PY  - 2018
TI  - Optical Knife-Edge Displacement Measurement with Sub-Picometer Resolution for RF-MEMS
ER  -