TY  - CONF
AU  - Hung, P.Y.
AU  - O'Loughlin, Thomas
AU  - Lewis, Aaron
AU  - Dechter, Rimma
AU  - Samayoa, Martin
AU  - Banerjee, Sarbajit
AU  - Wood, Erin
AU  - Walker, Angela Hight
C2  - Metrology, Inspection, and Process Control for Microlithography XXIX, San Jose, CA, US
DA  - 2015-03-19 00:03:00
DO  - https://doi.org/10.1117/12.2175623
LA  - en
PB  - Metrology, Inspection, and Process Control for Microlithography XXIX, San Jose, CA, US
PY  - 2015
TI  - Potential Application of Tip-Enhanced Raman Spectroscopy (TERS) in Semiconductor Manufacturing
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=917837
ER  -