TY  - CONF
AU  - Korde, Madhulika
AU  - Kline, Regis
AU  - Sunday, Daniel
AU  - Keller, Nick
AU  - Kal, Subhadeep
AU  - Alix, Cheryl
AU  - Mosden, Aelen
AU  - Diebold, Alain
C2  - SPIE Advanced Lithography, San Jose, CA, US
DA  - 2020-03-30 00:03:00
LA  - en
PB  - SPIE Advanced Lithography, San Jose, CA, US
PY  - 2020
TI  - X-Ray Metrology of Nanowire/ Nanosheet FETs for Advanced Technology Nodes
ER  -