TY  - JOUR
AU  - Zhou, Yong
AU  - Shen, Y
AU  - Zhang, Z
AU  - Tsai, Benjamin
AU  - DeWitt, D
C2  - International Conference on Advanced Thermal Processing of Semiconductors
DA  - 2000-09-20 00:09:00
LA  - en
PB  - International Conference on Advanced Thermal Processing of Semiconductors
PY  - 2000
TI  - Impact of Directional Properties on the Radiometric Temperature Measurement in Rapid Thermal Processing
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=850456
ER  -