TY  - JOUR
AU  - Vogt, B
AU  - Kang, Shuhui
AU  - Prabhu, Vivek
AU  - Lin, Eric
AU  - Satija, Sushil
AU  - Turnquest, Karen
AU  - Wu, Wen-Li
C2  - Macromolecules
DA  - 2006-10-26 00:10:00
LA  - en
M1  - 39
PB  - Macromolecules
PY  - 2006
TI  - Measurements of the Reaction-Diffusion Front of Model Chemically Amplified Photoresists With Varying Photoacid Size
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=852650
ER  -