TY  - CONF
AU  - Soles, Christopher
AU  - Lee, V.
AU  - Hedden, R
AU  - Liu, D
AU  - Bauer, Barry
AU  - Wu, Wen-Li
C2  - Polymers for Microelectronics and Nanolectronics | |, Undefined
DA  - 2004-04-01 00:04:00
LA  - en
M1  - 25(1)
PB  - Polymers for Microelectronics and Nanolectronics | |, Undefined
PY  - 2004
TI  - X-Ray Reflectivity Porosimetry for the Characterization of Porous Low-K Dielectric Constant Thin Films
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=852163
ER  -