TY  - CONF
AU  - IV, John Woodward
AU  - Choi, Kwang-Woo
AU  - Prabhu, Vivek
AU  - Kang, Shuhui
AU  - Lavery, Kristopher
AU  - Wu, Wen-Li
AU  - Leeson, Michael
AU  - Silva, Anuja De
AU  - Felix, Nelson
AU  - Ober, Christopher
C2  - Proceedings of SPIE, San Jose, CA, US
DA  - 2008-02-22 00:02:00
LA  - en
M1  - 6923
PB  - Proceedings of SPIE, San Jose, CA, US
PY  - 2008
TI  - Characterization of the Latent Image to Developed Image in Model EUV Photoresists
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=853583
ER  -