TY  - CONF
AU  - Kreider, K
AU  - Allen, David
AU  - Chen, D
AU  - DeWitt, D
AU  - Meyer, C
AU  - Tsai, Benjamin
C2  -  9th Intl. Conf. Advanced Thermal Processing of Semiconductors , , 1, SC
DA  - 2001-01-01 00:01:00
LA  - en
PB  -  9th Intl. Conf. Advanced Thermal Processing of Semiconductors , , 1, SC
PY  - 2001
TI  - Effects of Wafer Emissivity on Lightpipe Radiometry in RTP Tools
ER  -