TY  - JOUR
AU  - Goodman, R
AU  - Materer, N
AU  - Leone, S
C2  - Journal of Vacuum Science and Technology B
DA  - 1997-01-01 00:01:00
LA  - en
M1  - 15
PB  - Journal of Vacuum Science and Technology B
PY  - 1997
TI  - Ar, N2, Cl2 electron cyclotron resonance plasmas measured by time-of-flight analysis: Neutral kinetic energies and source gas cracking
ER  -