TY  - CONF
AU  - Kreider, K
AU  - Chen, D
AU  - Kimes, W
AU  - DeWitt, D
AU  - Tsai, Benjamin
C2  - 2003 Int''l Conf. Characterization and Metrology for ULSI Technology , Austin, TX, USA
DA  - 2003-01-01 00:01:00
LA  - en
PB  - 2003 Int''l Conf. Characterization and Metrology for ULSI Technology , Austin, TX, USA
PY  - 2003
TI  - Effects of Lightpipe Proximity on Si Wafer Temperature in Rapid Thermal Processing Tools
ER  -