TY - JOUR AU - Burnett, J AU - Levine, Zachary AU - Shirley, Eric C2 - Photonics Spectra DA - 2001-01-01 00:01:00 LA - en M1 - 35 PB - Photonics Spectra PY - 2001 TI - Intrinsic birefringence in cubic crystals: a new concern for lithography ER -