TY - JOUR AU - Stebbins, R AU - Newell, D AU - Richman, S AU - Bender, P AU - Faller, J AU - Mason, J C2 - Vibration Monitoring and Control SPIE Proc DA - 1994-01-01 00:01:00 LA - en M1 - 2264 PB - Vibration Monitoring and Control SPIE Proc PY - 1994 TI - Low-frequency, active vibration isolation system ER -