TY  - CONF
AU  - Allen, R
AU  - Patrick, Heather
AU  - Bishop, M
AU  - Germer, Thomas
C2  - 2007 IEEE International Conference on Microelectronic Test Structures , Tokyo, 1, JA
DA  - 2007-01-01 00:01:00
LA  - en
PB  - 2007 IEEE International Conference on Microelectronic Test Structures , Tokyo, 1, JA
PY  - 2007
TI  - Study of Test Structures for Use as Reference Material in Optical Critical Dimension Applications
ER  -