TY  - JOUR
AU  - Attota, R
AU  - Bishop, M
AU  - Davidson, M
AU  - Germer, Thomas
AU  - Howard, L
AU  - Larrabee, R
AU  - Marx, E
AU  - Silver, R
AU  - Stocker, M
C2  - Metrology Pages Inspection Pages and Process Control for Microlithography XIX Proc SPIE
DA  - 2005-01-01 00:01:00
LA  - en
M1  - 5752
PB  - Metrology Pages Inspection Pages and Process Control for Microlithography XIX Proc SPIE
PY  - 2005
TI  - High-resolution optical metrology, ed. by R.M. Silver
ER  -