TY  - JOUR
AU  - Zhao, Y
AU  - Mao, M
AU  - Horowitz, R
AU  - Varesi, J
AU  - Norton, P
AU  - Kitching, John
C2  - Journal of Microelectromechanical Systems
DA  - 2002-01-01 00:01:00
LA  - en
M1  - 11
PB  - Journal of Microelectromechanical Systems
PY  - 2002
TI  - Optomechanical Uncooled Infrared Imaging System: Design, Microfabrication and Performance,
ER  -