TY  - JOUR
AU  - Dragnea, B
AU  - Preusser, Jan
AU  - Szarko, J
AU  - McDonough, L
AU  - Leone, S
C2  - Proc ICSFS-10 Appl Surf Sci
DA  - 2001-01-01 00:01:00
LA  - en
M1  - 175
PB  - Proc ICSFS-10 Appl Surf Sci
PY  - 2001
TI  - Chemical mapping of patterned polymer photoresists by near-field infrared microsopy
ER  -