TY  - HEAR
AU  - Zhu, Xiaoxiao
AU  - Gu, H
AU  - Li, Qiliang
AU  - Baumgart, Helmut
AU  - Ioannou, D.
AU  - Suehle, John
AU  - Richter, Curt
DA  - 2009-10-06 00:10:00
LA  - en
PY  - 2009
TI  - Application of ALD High-k Dielectric Films as Charge Storage Layer and Blocking Oxide in Nonvolatile Memories
ER  -