TY  - JOUR
AU  - Ng, Kwok
AU  - Cheung, Kin
C2  - Future Fab International
DA  - 2012-01-12 00:01:00
LA  - en
PB  - Future Fab International
PY  - 2012
TI  - ITRS Chapter: Process Integration, Devices, and Structures
ER  -