TY  - JOUR
AU  - Li, Kai
AU  - Namboodiri, Pradeep
AU  - Chikkamaranahalli, Sumanth
AU  - Stan, Gheorghe
AU  - Attota, Ravikiran
AU  - Fu, Joseph
AU  - Silver, Richard
C2  - Applied Physics Letters
DA  - 2011-08-09 00:08:00
LA  - en
M1  - 29
PB  - Applied Physics Letters
PY  - 2011
TI  - Controlling Formation of Atomic Step Morphology on Micro-patterned Si (100)
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=907301
ER  -