TY  - JOUR
AU  - Chu, JiYoung
AU  - Wang, Quandou
AU  - Lehan, John
AU  - Griesmann, Ulf
C2  - Optical Engineering
DA  - 2010-09-01 00:09:00
LA  - en
M1  - 49
PB  - Optical Engineering
PY  - 2010
TI  - Spatially resolved height response of phase-shifting interferometers measured using a patterned mirror with varying spatial frequency
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=903805
ER  -