TY  - JOUR
AU  - Florian, Weilnboeck
AU  - Kumar, Nirav
AU  - Oehrlein, Gottlieb
AU  - Chung, Ting-Ying
AU  - Graves, D
AU  - Li, Mingqi
AU  - Hudson, Eric
AU  - Benck, Eric
C2  - Journal of Vacuum Science and Technology B
DA  - 2012-05-23 00:05:00
DO  - https://doi.org/10.1116/1.3697752
LA  - en
M1  - 30
PB  - Journal of Vacuum Science and Technology B
PY  - 2012
TI  - Real-time measurements of plasma photoresist modifications: The role of plasma vacuum ultraviolet radiation and ions
ER  -