TY  - CONF
AU  - Kruger, Kirstin
AU  - higgins, craig
AU  - Gallatin, Gregg
AU  - Brainard, Robert
C2  - 28th International Conference of Photopolymer Science and Technology, Chiba, JP
DA  - 2011-07-28 00:07:00
LA  - en
M1  - 24
PB  - 28th International Conference of Photopolymer Science and Technology, Chiba, JP
PY  - 2011
TI  - Lithography and Chemical Modeling of Acid Amplfiers for Use in EUV Photoresists
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=908397
ER  -