TY  - CONF
AU  - Luciani, Vincent
AU  - Jr, William Young
AU  - Chen, Lei
AU  - Bowser, Jerry
C2  - University Government Industry Micro/Nano Symposium, Berkeley, CA, US
DA  - 2012-07-23 00:07:00
DO  - https://doi.org/10.1109/UGIM.2012.6247086
LA  - en
PB  - University Government Industry Micro/Nano Symposium, Berkeley, CA, US
PY  - 2012
TI  - A Phosphine Sub Atmospheric Delivery System (SADS) applied to Low Pressure Chemical Vapor Deposition (LPCVD) of in situ doped Polysilicon.
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=911015
ER  -