TY  - JOUR
AU  - Berro, Adam
AU  - Berglund, Andrew
AU  - Carmichael, Peter
AU  - Kim, Jong
AU  - Liddle, James
C2  - ACS Nano
DA  - 2012-10-26 00:10:00
DO  - https://doi.org/10.1021/nn304285m
LA  - en
M1  - 6
PB  - ACS Nano
PY  - 2012
TI  - Super-resolution Optical Measurement of Nanoscale Photoacid Distribution in Lithographic Materials
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=909231
ER  -