TY  - JOUR
AU  - Ukraintsev, Vladimir
AU  - Orji, Ndubuisi
AU  - Vorburger, Theodore
AU  - Dixson, Ronald
AU  - Fu, Joseph
AU  - Silver, Richard
C2  - Journal of Micro/Nanolithography, MEMS, and MOEMS
DA  - 2013-04-01 00:04:00
LA  - en
M1  - 12
PB  - Journal of Micro/Nanolithography, MEMS, and MOEMS
PY  - 2013
TI  - Distributed Force Probe Bending Model of CD-AFM Bias
ER  -