TY  - JOUR
AU  - Olfatnia, Mohammad
AU  - Sood, Siddharth
AU  - Gorman, Jason
AU  - Awtar, Shorya
C2  - IEEE Journal of Microelectromechanical Systems (Journal of MEMs)
DA  - 2013-04-30 00:04:00
LA  - en
M1  - 22
PB  - IEEE Journal of Microelectromechanical Systems (Journal of MEMs)
PY  - 2013
TI  - Large Stroke Electrostatic Comb Drive Actuators Enabled by a Novel Flexure Mechanism
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=912124
ER  -