TY  - CHAP
AU  - Vartanian, Victor
AU  - Allen, Richard
AU  - Humler, Klaus
AU  - Olsen, Steve
AU  - Sapp, Brian
AU  - Smith, Larry
C2  - Handbook of 3D Integration: Volume 3, Wiley, Malden, MA
DA  - 2014-06-20 00:06:00
DO  - https://doi.org/10.1002/9783527670109.ch29
LA  - en
M1  - 3
PB  - Handbook of 3D Integration: Volume 3, Wiley, Malden, MA
PY  - 2014
TI  - Metrology Needs for 2.5D/3D Interconnect
ER  -