TY  - JOUR
AU  - Park, Jungjae
AU  - Chen, Lingfeng
AU  - Wang, Quandou
AU  - Griesmann, Ulf
C2  - Optics Express
DA  - 2012-08-17 00:08:00
LA  - en
PB  - Optics Express
PY  - 2012
TI  - A modified Roberts-Langenbeck test for measuring thickness and refractive index variation of silicon wafers
ER  -