TY  - CONF
AU  - Silver, Richard
AU  - Barnes, Bryan
AU  - Zhang, Nien
AU  - Zhou, Hui
AU  - Vladar, Andras
AU  - Villarrubia, John
AU  - Kline, Regis
AU  - Sunday, Daniel
AU  - Vaid, Alok
C2  - Proceedings of the SPIE, San Jose, CA, US
DA  - 2014-04-14 00:04:00
DO  - https://doi.org/10.1117/12.2048225
LA  - en
M1  - 9050
PB  - Proceedings of the SPIE, San Jose, CA, US
PY  - 2014
TI  - Optimizing Hybrid Metrology through a Consistent Multi-Tool Parameter Set and Uncertainty Model
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=915846
ER  -