TY - JOUR AU - Hubner, H AU - Moertelmaier, M. AU - Kabos, Pavel AU - Fenner, M. AU - Rankl, C AU - Imtiaz, Atif C2 - Review of Scientific Instruments DA - 2010-11-02 00:11:00 DO - https://doi.org/10.1063/1.3491926 LA - en M1 - 81 PB - Review of Scientific Instruments PY - 2010 TI - Calibrated nanoscale capacitance measurements using a scanning microwave microscope ER -