TY - JOUR AU - Hazra, Siddharth AU - Beuth, Jack AU - Myers, Grant AU - DelRio, Frank AU - Boer, Maarten de C2 - Journal of Micromechanics and Microengineering DA - 2015-01-02 00:01:00 LA - en M1 - 25 PB - Journal of Micromechanics and Microengineering PY - 2015 TI - Design and test of reliable, high strength, ingressive polycrystalline silicon microgripper arrays UR - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=916443 ER -