TY  - CONF
AU  - Damazo, Bradley
AU  - Vladar, Andras
AU  - Marie-Rose, Olivier
AU  - Kramar, John
C2  - Proceedings of euspen's 15th International Conference, Leuven, -1
DA  - 2015-06-02
LA  - en
PB  - Proceedings of euspen's 15th International Conference, Leuven, -1
PY  - 2015
TI  - Nanometer level sampling and control of a scanning electron microscope
ER  -