TY - JOUR AU - Paramanik, Dipak AU - Motayed, Abhishek AU - Aluri, Geetha AU - Krylyuk, Sergiy AU - Davydov, Albert C2 - Journal of Vacuum Science and Technology B DA - 2012-06-26 00:06:00 LA - en M1 - 30 PB - Journal of Vacuum Science and Technology B PY - 2012 TI - Formation of large-area GaN nanostructures with controlled geometry and morphology using top-down fabrication scheme. ER -