TY  - JOUR
AU  - Koppinen, Panu
AU  - Stewart, Michael
AU  - Zimmerman, Neil
C2  - Journal of Applied Physics
DA  - 2012-12-19 00:12:00
LA  - en
PB  - Journal of Applied Physics
PY  - 2012
TI  - Fabrication and Electrical Characterization of Fully CMOS Si Single Electron Devices
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=911577
ER  -