TY - JOUR AU - Kang, Shuhui AU - Prabhu, Vivek AU - Soles, Christopher AU - Lin, Eric AU - Wu, Wen-Li C2 - Macromolecules DA - 2009-07-02 00:07:00 LA - en M1 - 42 PB - Macromolecules PY - 2009 TI - Methodology for quantitative measurements of multilayer polymer thin films with IR spectroscopic ellipsometry UR - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=902197 ER -