TY  - JOUR
AU  - Kang, Shuhui
AU  - Wu, Wen-Li
AU  - Choi, Kwang-Woo
AU  - Prabhu, Vivek
AU  - Silva, Anuja De
AU  - Ober, Christopher
C2  - Macromolecules
DA  - 2010-04-14 00:04:00
LA  - en
PB  - Macromolecules
PY  - 2010
TI  - Characterization of the photoacid diffusion length and reaction kinetics in EUV photoresists with IR spectroscopy
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=904320
ER  -