TY  - CONF
AU  - Avramov-Zamurovic1, Svetlana
AU  - Dagalakis, Nicholas
AU  - Lee, Rae
AU  - Kim, Yong
AU  - Yoo, Jae
AU  - Yang, Seung
C2  - Conference on Precision Electromagnetic Measurements 2010, Daejeon, KR
DA  - 2010-08-17 00:08:00
LA  - en
PB  - Conference on Precision Electromagnetic Measurements 2010, Daejeon, KR
PY  - 2010
TI  - Embedded Capacitive Displacement Sensor for Nanopositioning Applications
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=906019
ER  -