TY  - JOUR
AU  - Cromer, C
AU  - Lucatorto, Thomas
AU  - O'Brian, Thomas
AU  - Walhout, M
C2  - Solid State Technology
DA  - 1996-01-01 00:01:00
LA  - en
M1  - 39
PB  - Solid State Technology
PY  - 1996
TI  - Improved Dose Metrology in Optical Lithograph
ER  -