TY - CONF AU - Bodycomb, J AU - DeWitt, D AU - Kimes, W AU - Kreider, K AU - Tsai, Benjamin C2 - 12th IEE Intl. Conf. on Advanced Thermal Processing RTP 2004 , Portland, OR, USA DA - 2004-01-01 00:01:00 LA - en PB - 12th IEE Intl. Conf. on Advanced Thermal Processing RTP 2004 , Portland, OR, USA PY - 2004 TI - Emissivity Compensated Pyrometry for Specular Silicon Surfaces on the NIST RTP Test Bed ER -