TY - JOUR AU - Parks, D AU - Stockli, M AU - Bell, E AU - Ratliff, L AU - Schmieder, R AU - Serpa, F. AU - Gillaspy, John C2 - Nuclear Instruments & Methods in Physics Research Section B-Beam Interactions With Materials and Atoms DA - 1998-01-01 00:01:00 LA - en M1 - 134 PB - Nuclear Instruments & Methods in Physics Research Section B-Beam Interactions With Materials and Atoms PY - 1998 TI - Non-kinetic Damage on Insulating Materials by Highly Charged Ion Bombardment ER -