TY  - JOUR
AU  - Frigo, S
AU  - Levine, Zachary
AU  - Zaluzec, N
C2  - Applied Physics Letters
DA  - 2002-01-01 00:01:00
LA  - en
M1  - 81
PB  - Applied Physics Letters
PY  - 2002
TI  - Submicron imaging of buried integrated circuit structures using scanning confocal electron microscopy
ER  -