TY  - JOUR
AU  - Dragnea, B
AU  - Preusser, J
AU  - Szarko, J
AU  - McDonough, L
AU  - Leone, S
AU  - Hinsberg, W
C2  - Applied Surface Science
DA  - 2001-05-01 00:05:00
LA  - en
M1  - 175
PB  - Applied Surface Science
PY  - 2001
TI  - Chemical Mapping of Patterned Polymer Photoresists by Near-Field Infrared Microscopy
ER  -