TY  - CONF
AU  - Bajt, Sasa
AU  - Chapman, H
AU  - Nguyen, Nhan
AU  - Alameda, J
AU  - Robinson, J
AU  - Malinowski, M
AU  - Gullikson, E
AU  - Aquila, Andrew
AU  - Tarrio, Charles
AU  - Grantham, Steven
C2  - Emerging Lithographic Technologies, Conference | 7th | Emerging Lithographic Technologies VII | SPIE, Undefined
DA  - 2003-06-01 00:06:00
LA  - en
M1  - 5037
PB  - Emerging Lithographic Technologies, Conference | 7th | Emerging Lithographic Technologies VII | SPIE, Undefined
PY  - 2003
TI  - Design and Performance of Capping Layers for EUV Multilayer Mirrors
ER  -