TY  - JOUR
AU  - Allain, J
AU  - Nieto, M
AU  - Hendricks, M
AU  - Hassanein, A
AU  - Tarrio, Charles
AU  - Grantham, Steven
AU  - Bakshi, Vivek
C2  - SPIE
DA  - 2007-10-01 00:10:00
LA  - en
M1  - 6517
PB  - SPIE
PY  - 2007
TI  - Energetic and Thermal Sn Interactions and Their Effect on EUVL Source Collector Mirror Lifetime at High Temperatures
ER  -