TY  - JOUR
AU  - Klamo, Jennifer
AU  - Schenck, Peter
AU  - Burke, Peter
AU  - Chang, Kao-Shuo
AU  - Green, Martin
C2  - Journal of Applied Physics
DA  - 2010-03-10 00:03:00
LA  - en
M1  - 107
PB  - Journal of Applied Physics
PY  - 2010
TI  - Manipulation of crystallinity boundary via process space investigations of pulsed laser deposited high-k HfO2-TiO2-Y2O3 combinatorial thin films
ER  -