TY  - JOUR
AU  - Kang, Shuhui
AU  - Vogt, B
AU  - Prabhu, Vivek
AU  - Lin, Eric
AU  - Wu, Wen-Li
AU  - VanderHart, David
AU  - Rao, Ashwin
AU  - Turnquest, Karen
C2  - Macromolecules
DA  - 2007-02-09 00:02:00
LA  - en
M1  - 40
PB  - Macromolecules
PY  - 2007
TI  - Characterization of Compositional Heterogeneity in Chemically Amplified Photoresist Polymer Thin Films with Infrared Spectroscopy
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=852648
ER  -