TY  - CONF
AU  - Wang, M
AU  - Lin, Eric
AU  - Karim, Alamgir
AU  - Fasolka, Michael
C2  - Characterization and Metrology for ULSI Technology: 2003 International Conference, Austin, TX
DA  - 2003-01-01 00:01:00
LA  - en
PB  - Characterization and Metrology for ULSI Technology: 2003 International Conference, Austin, TX
PY  - 2003
TI  - Combinatorial Methods Study of Confinement Effects on the Reaction Front in Ultrathin Chemically Amplified Photoresists
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=853895
ER  -