TY  - CONF
AU  - Lenhart, Joseph~undefined~undefined~undefined~undefined~undefined
AU  - Fischer, Daniel
AU  - Sambasivan, S
AU  - Lin, Eric
AU  - Soles, Christopher
AU  - Jones, Ronald
AU  - Wu, Wen-Li
AU  - Goldfarb, D
AU  - Angelopoulos, M
C2  - Special Issue of the 2002 Symposium on Microelectronics, Boston, MA
DA  - 2002-01-01 00:01:00
LA  - en
PB  - Special Issue of the 2002 Symposium on Microelectronics, Boston, MA
PY  - 2002
TI  - Utilizing Near Edge X-ray Absorption Fine Structure to Probe interfacial issues in Photolithography
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=853914
ER  -